| Leakage detection accuracy |
6NmL/(h·L), 1.0E-6~1.0E-3Pa.m3/s; |
|
Helium filling pressure |
35.0~87.5MPa； |
|
Detection rhythm |
hydrogen cylinder: 15-60min/piece; |
|
Detection method |
Check the overall leakage rate, and can also assist in using the suction gun method to find leakage points； |
|
Structural style |
side door opening； |
|
Security protection |
grating protection, electrical interlocking, hierarchical password, sound and light alarm; |
|
Automation |
PLC control, touch screen operation, automatic entry and exit of workpieces into the vacuum chamber, automatic evacuation and leak detection, automatic door opening and closing； |
|
Intelligent |
remote monitoring, automatic storage of data, communication with MES or databases； |
|
Applicability |
Non standard customized solutions to meet customer needs; |