| Leakage detection accuracy |
1.0E-7~1.0E-4Pa.m3/s; |
|
Helium filling pressure |
0.25~2.0MPa; |
|
Detection rhythm |
20s~300s/piece; |
|
Detection method |
Check the overall leakage rate, and can also assist in using the suction gun method to find leakage points； |
|
Level 3 leakage detection |
major leakage detection, medium leakage detection, and minor leakage detection； |
|
Structural style |
bell type/sliding door type etc; |
|
Security protection |
grating protection, electrical interlocking, hierarchical password, sound and light alarm; |
|
Economy |
Helium recovery and recycling, low maintenance cost； |
|
Intelligent |
remote monitoring, automatic storage of data, communication with MES or databases； |
|
Automation |
PLC control, touch screen operation, automatic entry and exit of workpieces into the vacuum chamber, automatic evacuation and leak detection, automatic door opening and closing; |
|
Applicability |
Non standard customized solutions to meet customer needs; |